Having followed the whole thread of this debate, there is one thing that no-one has mentioned.
The most simple way at looking at increased pressure of gasses is an increased concentration. So, whilst nothing much is going to happen to your reg at the surface, especially if the high pressure seat of the first stage is made of an inert material (eg mares ruby seat in some of their first stages), then the intermediate pressure is only some 9 or 10 bar greater than atmosphere. At this point all the little o-rings in the system are exposed to what can be considered are oxygen at 10 times the concentration of normal air.
Now, for every 10 metres (33 fsw) we are adding another bar pressure, and increasing the concentration of oxygen that all the o-rings experience.
Oxygen is quite a reactive gas, and what actually happens is that the oxygen oxidises impurities in the o-ring material, and to a much lower extent the rubber itself, and what happens over time is that they degrade, going brittle and hard.
The other important point is that the Oxygen won't just interact with the o-rings (and in some regs even more importantly the high pressure seat), but will also interact will ANY available material, such as oil / grease / dirt in the tank.
A good analogy of this is what happens when a steal cylinder gets moisture inside. The tank rusts. Rapidly. the tank would rust anyway, but due to the higher effective concentration of oxygen due to the pressure (the pressure obviously increases the net Oxygen concentration for air as well as nitrox) the rusting (oxidation) takes place at a much faster rate.
Really, what is the main risk is the high pressure seat being damaged. all it would take would be a small part of the seat stopping sealing, and then the intermediate pressure part of the reg (everything from the first stage valve seat until your mouth) would then be at tank pressure, not ambient + 9 bar or so.
There is probably a calculable, and reasonably small chance of this actually happening, however, as it is known that oxygen degrades the standard o-rings then the manufacturers are onto a losing streak if they were ever sued after some-one had an accident that was caused by an O-ring blowing out.
Personally, when I started diving nitrox, I took my regs to be serviced, and asked the technician to fit the viton nitrox o-rings and clean the reg for nitrox. The service cost the same as it would for a normal service. However, this does rely on you having a reg that can be bought in a nitrox disguise ('cos if they sell the nitrox version, all the correct seals are available to the technician).
As for the issue of what %Ox you need to start thinking about nitrox clean, if you can get it done at no extra cost on the next service then why not?
hope this makes things clearer
Jon T